XPS chemical state mapping in opto- and microelectronics

The strength of XPS imaging lies in its ability to (i) locate small patterns on sample surface, and (ii) inform, with micrometric lateral resolution, about the chemical environment elements detected at surface. In this context, strontium-based perovskites appear be well-adapted for such photoemission experiments thanks their tunability variability. These functional oxides have great potential emerging optoand microelectronic applications, especially transparent conductive oxide. Patterned heterostructure SrTiO 3 /SrVO was grown by pulsed laser deposition using a shadow mask. This stack then analysed mapping serial acquisition mode. Ti2p V2p core level clearly highlights SrVO domains. Sr3d will extensively discussed: strontium being common element both very similar environment. Despite lower contrast images, two materials are discernible topography. addtion, use FWHM image is real asset evidence phases. Finally, data processing principal component analysis allows us extract significant spectral information atoms.